浣滆 | 闄堝穽 鍗冭姱 绉戞妧
缂栬呮敞锛 鑻规灉浜3鏈9鏃ュ叕甯冨叾杩勪粖鏈寮鸿嚜鐮旂數鑴戣姱鐗嘙1 Ultra锛屽畠灏嗕袱涓狹1 Max鑺墖鎷煎湪涓璧凤紝浣垮緱鑺墖鍚勯」纭欢鎸囨爣鐩存帴缈诲嶏紝杩欒儗鍚庣殑鍏抽敭鎶鏈嵆鏄嫻鏋滃垱鏂板畾鍒剁殑灏佽鏋舵瀯UltraFusion銆傚崈鑺 绉戞妧 钁ｄ簨闀块檲宸嶉氳繃鍒嗘瀽鑻规灉鍏徃涓庡叾鑺墖浠ｅ伐鍘傚彴绉數鐨勪笓鍒╁拰璁烘枃锛屽杩欎竴鍏堣繘灏佽鎶鏈繘琛岃В璇汇
2022骞3鏈堬紝鑻规灉鍙堜竴娆¤Е鍔ㄤ簡 鑺墖鐣岀殑 娓告垙 瑙勫垯 銆傝嫻鏋滃彂甯冪殑M1 Ultra鑺墖锛屾槸杩勪粖涓烘璇ュ叕鍙告渶寮哄ぇ鐨勮姱鐗囷紝鍗存槸涓涓 鎷艰璐 鈥濄傚敖绠″緢澶氳绠楄姱鐗囧凡閲囩敤Chiplet锛堣姱绮掞級鎶鏈彁鍗囨ц兘锛屼絾鈥滄嫾瑁呰揣鈥滿1 Ultra鐨勬ц兘杩樻槸璁 PC鐣岄渿鎾 浜嗐
M1 Ultra鏀寔楂樿揪128GB鐨勯珮甯﹀銆佷綆寤惰繜缁熶竴鍐呭瓨锛屾敮鎸20涓狢PU鏍稿績銆64涓狦PU鏍稿績鍜32鏍哥缁忕綉缁滃紩鎿庯紝姣忕鍙繍琛岄珮杈22涓囦嚎娆¤繍绠楋紝鎻愪緵鐨凣PU鎬ц兘鏄嫻鏋淢1鑺墖鐨8鍊嶏紝鎻愪緵鐨凣PU鎬ц兘姣旀渶鏂扮殑16鏍窹C鍙板紡鏈鸿繕楂90%銆
鑻规灉鐨勬柊M1 Ultra鑺墖鈥滄嫾瑁呪濇ц兘涔嬫墍浠ユ垚涓哄彲鑳斤紝瑕佸綊鍔熶簬鍏 UltraFusion鏋舵瀯 銆傚叾瀹烇紝UltraFusion鍔熻兘鏃╁凡鍐呯疆绔栬皑浜庝箣鍓嶅彂甯冪殑鑻规灉M1 Max鑺墖涓紝浣嗙洿鍒3鏈堢殑鑻规灉Peek Performance娲诲姩鎵嶈鏄庣‘鎻愬嚭銆
鑻规灉鍏徃M1 Ultra鐨刄ltraFusion鏋舵瀯
M1 Ultra鑺墖鐨刄ltraFusion鏋舵瀯浣跨敤 纭呬腑浠嬪眰锛圫ilicon Interposer锛 鍜 寰瀷鍑稿潡锛圡icro-Bump锛 锛屽皢鑺墖杩炴帴鍒拌秴杩10,000涓俊鍙枫
璇ユ妧鏈彁渚2.5TB/s鐨勮秴楂樺鐞嗗櫒闂村甫瀹斤紝浠ュ強浣庡欢杩熴傝繖涓鎬ц兘鏄叾浠栧鑺墖浜掕繛鎶鏈甫瀹界殑4鍊嶅銆傝繖涓熺巼甯﹀涔熸槑鏄鹃鍏堜簬鑻辩壒灏斻丄MD銆丄rm銆佸彴绉數鍜屼笁鏄熺瓑浼楀琛屼笟宸ㄥご缁勬垚鐨勯氱敤鑺矑浜掕繛鑱旂洘锛圲CIe锛夊綋鍓嶇殑鎬ц兘銆
鑻辩壒灏旂瓑宸ㄥご涓绘帹鐨刄CIe
鏍规嵁鑻规灉鍏徃鍜屽彴绉數宸插彂琛ㄧ殑涓撳埄鍜岃鏂囷紝鎴戜滑浠2.5D/3D浜掕繛鍜屾妧鏈眰闈㈣В鏋怳ltraFusion灏佽鏋舵瀯銆
涓銆佽姱鐗囧皝瑁呰蛋鍚2.5D/3D浜掕繛
鎸夋懇灏斿畾寰嬫弿杩帮紝鑺墖涓婄殑鏅朵綋绠℃暟閲忔瘡24涓湀缈讳竴鐣傝繖瀵逛簬CPU銆丟PU銆丗PGA鍜孌SA渚濈劧閫傜敤銆
鑺墖鏅朵綋寮粴绠℃暟閲忛愭笎澧為暱锛圷. H. Chen et al., 2020锛
闅忕潃鑺墖绠楀姏鍛堟寚鏁扮骇澧為暱锛岃姱鐗囧昂瀵搁愭笎 瓒呭嚭鍏夊埢鎺╂ā鐗堝昂瀵 锛岀郴缁熺骇灏佽锛圫ystem on Package锛孲oP锛夛紝鐗瑰埆鏄疌hiplet鎶鏈紝鎴愪负缁存寔鎽╁皵瀹氬緥锛岃秴瓒婃帺妯＄増闄愬埗鐨勬湁鏁堟柟寮忋傦紙Y. H. Chen et al., 2020锛
鍥剧伒濂栧緱涓诲鏈熸櫤闄㈠＋涔熼潪甯搁噸瑙咰hiplet鎶鏈紝鍦2020骞存寚瀵兼垚绔嬩簡涓浗鑷繁鐨 Chiplet浜т笟鑱旂洘 锛岃鑱旂洘涓庡寳鏋侀泟鑺叡鍚屼负鍥藉唴璁捐浼佷笟鎻愪緵Chiplet浜ゆ祦鍚堜綔鐨勫钩鍙板拰楂樻т环鐨勮В鍐虫柟妗堛
楂樻т环姣旂殑Chiplet鏂规锛堝寳鏋侀泟鑺/涓浗Chiplet浜т笟鑱旂洘鎻愪緵锛
閫氳繃蹇熷彂灞曠殑鐗囬棿浜掕繛鎶鏈拰灏佽鎶鏈紝鎽╁皵瀹氬緥浠庡崟鐙殑鏅朵綋绠＄缉鏀撅紙鎽╁皵瀹氬緥1.0锛夋紨鍙樹负绯荤粺绾х缉鏀撅紙琚笟鐣屾垙绉颁负 鎽╁皵瀹氬緥2.0锛 銆
鐗囬棿浜掕繛鎶鍩嬬氦浣欐湳閫愬勾蹇熷彂灞曪紙Y. H. Chen et al., 2020锛
灏佽浠2D锛堜簩缁达級閫愭笎鍙戝睍鍒 2.5D鍜3D 銆傞泦鎴愮數璺粠鎵╁ぇ闈㈢Н鍜岀珛浣撳彂灞曚袱鏉¤矾鏉ユ彁鍗囨暣浣撴ц兘銆
灏佽浠2D锛堜簩缁达級閫愭笎鍙戝睍鍒2.5D鍜3D锛圞uo-Chung Yee et al., 2020锛
浜屻佷粠鑻规灉鍙扮Н鐢典笓鍒╄鏂囷紝瑙ｆ瀽UltraFusion鏋舵瀯
浠嶮1 Ultra鍙戝竷鐨刄ltraFusion鍥剧ず锛屼互鍙婅嫻鏋滃強鍏朵唬宸ュ巶锛堝彴绉數锛夌殑鍏紑涓撳埄鍜岃鏂囨潵鐪嬶紝UltraFusion搴旀槸鍩轰簬鍙扮Н鐢电浜斾唬CoWoS Chiplet鎶鏈殑浜掕繛鏋舵瀯銆
鑻规灉鍏徃Chiplet涓撳埄涓嶮1 Ultra锛堝弬鑰冧笓鍒︰S 20220013504A1锛
Chip-on-Wafer-on-Substrate with Si interposer 锛圕oWoS-S锛夋槸涓绉嶅熀浜嶵SV鐨勫鑺墖闆嗘垚鎶鏈紝琚箍娉涘簲鐢ㄤ簬楂樻ц兘璁＄畻锛圚PC锛夊拰浜哄伐鏅鸿兘锛圓I锛夊姞閫熷櫒棰嗗煙銆
闅忕潃CoWoS鐨勮繘姝ワ紝鍙埗閫犵殑涓粙灞傦紙Interposer锛夐潰绉ǔ姝ュ鍔狅紝浠庝竴涓叏鎺╂ā鐗堝昂瀵革紙澶х害830mm2锛夊埌涓や釜鎺╂ā鐗堝昂瀵革紙澶х害1700mm2锛夈備腑浠嬪眰鐨勯潰绉喅瀹氫簡鏈澶х殑灏佽鍚庣殑鑺墖鐨勯潰绉
绗5浠oWoS-S锛圕oWoS-S5锛夎揪鍒颁簡澶ц嚦涓変釜鍏ㄥ厜缃╁昂瀵革紙~2500mm2锛夌殑姘村钩銆傞氳繃 鍙岃矾鍏夊埢鎷兼帴 鏂规硶锛岃鎶鏈殑纭呬腑浠嬪眰鍙绾1200mm2鐨勫涓昏緫鑺矑鍜屽叓涓狧BM锛堥珮甯﹀鍐呭瓨锛夊爢鏍堛傝姱绮掍笌纭呬腑浠嬪眰鐨勯噰鐢ㄩ潰瀵归潰锛團ace to Face锛屼簰杩炲眰涓庝簰杩炲眰瀵规帴锛夌殑杩炴帴鏂瑰紡銆
CoWoS鎶鏈墍鑳芥壙杞界殑鎬昏姱鐗囬潰绉愭笎澧炲ぇ锛圥. K. Huang 2021锛
鍦║ltraFusion鎶鏈腑锛岄氳繃浣跨敤 瑁哥墖缂濆悎锛圖ie Stitching锛 鎶鏈紝鍙皢4涓帺妯＄増鎷兼帴鏉ユ墿澶т腑浠嬪眰鐨勯潰绉傚湪杩欑鏂规硶涓紝4涓帺妯¤鍚屾椂鏇濆厜锛屽苟鍦ㄥ崟涓姱鐗囦腑鐢熸垚鍥涗釜缂濆悎鐨勨滆竟缂樷濄
UltraFusion鏋舵瀯浜掕繛鎶鏈紙鍗曞眰涓庡灞傦紝鍙傝冧笓鍒︰S 20220013504A1/US 20210217702A1锛
鏍规嵁鑻规灉鍏徃鐨勪笓鍒╂樉绀猴紝鍦ㄨ繖涓鎶鏈腑锛岀墖闂翠簰杩炲彲浠ユ槸鍗曞眰閲戝睘锛屼篃鍙互鏄 澶氬眰閲戝睘 銆傦紙US 20220013504A1/US 20210217702A1锛
涓夈佸叚澶ф妧鏈壒鍒紭鍖
UltraFusion涓嶄粎浠呮槸绠鍗曠殑鐗╃悊杩炴帴缁撴瀯銆傚湪杩欎竴灏佽鏋舵瀯涓紝鏈夊嚑椤圭壒鍒紭鍖栬繃鐨勬妧鏈傦紙P. K. Huang 2021锛
1锛変綆RC浜掕繛
鍦║ltraFusion涓紝鏈夋柊鐨勪綆RC锛堢數瀹箈鐢甸樆=浼犺緭寤惰繜锛夐噾灞炲眰锛屼互鍦ㄦ绫充簰杩炲昂搴︿笂鎻愪緵鏇村ソ鐨勭墖闂翠俊鍙峰畬鏁存с
涓庡鑺墖妯″潡锛圡CM锛夌瓑鍏朵粬灏佽瑙ｅ喅鏂规鐩告瘮锛孶ltraFusion鐨勪腑浠嬪眰鍦ㄩ昏緫鑺矑涔嬮棿鎴栭昏緫鑺矑鍜屽瓨鍌ㄥ櫒鍫嗘爤涔嬮棿鎻愪緵瀵嗛泦涓旂煭鐨勯噾灞炰簰杩炪傜墖闂村畬鏁存ф洿濂斤紝涓旇兘鑰楁洿浣庯紝骞惰兘浠ユ洿楂樼殑鏃堕挓閫熺巼杩愯銆傝繖绉嶆柊鐨勪腑浠嬪眰浜掕繛鏂规灏嗚蛋绾跨數闃诲拰閫氬瓟鐢甸樆闄嶄綆浜50%浠ヤ笂銆
璺ㄤ腑浠嬪眰浼犺緭鐨勪簰杩炲姛鑰楁帶鍒讹紙US 20210217702A1锛
2锛変簰杩炲姛鑰楁帶鍒
鑻规灉鐨勪笓鍒╂樉绀猴紝UltraFusion浣跨敤浜嗗彲鍏抽棴鐨勭紦鍐插櫒锛圔uffuer锛夛紝杩涜浜掕繛缂撳啿鍣ㄧ殑鍔熻楁帶鍒讹紝鏈夋晥闄嶄綆鏆傚仠鐨勪簰杩炵嚎鐨勮兘鑰椼
3锛変紭鍖朤SV
楂樼旱妯瘮鐨勭閫氬瓟锛圱SV锛夋槸纭呬腑浠嬪眰鎶鏈彟涓涓潪甯稿叧閿殑閮ㄥ垎銆俇ltraFusion/CoWoS-S5閲嶆柊璁捐浜員SV锛屼紭鍖栦簡浼犺緭鐗规э紝浠ラ傚悎楂橀烻erDes浼犺緭銆
4锛夐泦鎴愬湪涓粙灞傜殑鐢靛锛坕CAP锛
UltraFusion鍦ㄤ腑浠嬪眰闆嗘垚浜嗘繁娌熸Ы鐢靛鍣紙iCap锛夛紝甯姪鎻愬崌鑺墖鐨勭數婧愬畬鏁存с傞泦鎴愬湪涓粙灞傜殑鐢靛瀵嗗害瓒呰繃300nF/mm2锛屽府鍔╁悇鑺矑鍜屼俊鍙蜂簰杩炰韩鏈夋洿绋冲畾鐨勪緵鐢点
5锛夋柊鐨勭儹鐣岄潰鏉愭枡
UltraFusion閫氳繃闆嗘垚鍦–oWoS-S5涓殑鏂板瀷闈炲嚌鑳跺瀷鐑晫闈㈡潗鏂欙紙TIM锛夛紝鐑鐜>20W/K锛岃鐩栫巼杈惧埌100%锛屼负鍚勪釜楂樼畻鍔涜姱绮掓彁渚涙洿濂界殑鏁ｇ儹鏀寔锛屼粠鑰屽寮烘暣浣撴暎鐑
閫氳繃Die-Stitching鎻愰珮鑹巼骞堕檷浣庢垚鏈紙US 20220013504A1锛
6锛夐氳繃Die-Stitching鎶鏈湁鏁堟彁鍗囧皝瑁呰壇鐜囬檷浣庢垚鏈
UltraFusion涓紝浠呭皢KGD锛圞nown Good Die锛夎繘琛岄敭鍚堬紝杩欐牱閬垮厤浜嗕紶缁熺殑WoW锛圵afer on Wafer锛夋垨CoW锛圕hip on Wafer锛変腑澶辨晥鐨勮姱绮掕灏佽鐨勯棶棰橈紝杩涜 鎻愬崌灏佽鍚庣殑鑹巼 锛岄檷浣庝簡鏁翠綋鐨勫钩鍧囨垚鏈傦紙鍧忕殑鑺墖瓒婂皯锛屽湪鍥哄畾鐨勬祦鐗囧拰鐮斿彂璐圭敤鍓嶆彁涓嬶紝鍗曡姱鐗囧钩鍧囨垚鏈氨瓒婁綆锛
鍥涖佺粨璇細涓烘洿寮虹畻鍔涜姱鐗囨彁渚涙兂璞＄┖闂
鏈枃涓紝鎴戜滑浠庤嫻鏋滃叕鍙稿拰鍙扮Н鐢电殑涓撳埄鍜岃鏂囧嚭鍙戯紝瀵筓ltraFusion鎶鏈繘琛屼簡鍒濇鐨勮В鏋愩
UltraFusion鍏呭垎缁撳悎浜嗗皝瑁呬簰杩炴妧鏈佸崐瀵间綋鍒堕犲拰鐢佃矾璁捐鎶鏈紝涓烘暣鍚堥潰绉洿澶с佹ц兘鏇撮珮鐨勭畻鍔涜姱鐗囨彁渚涗簡 宸ㄥぇ鐨勬兂璞＄┖闂 锛屼负璁＄畻鏋舵瀯鐨勫彂灞曟彁渚涗簡闈炲父濂界殑鍔╁姏鍜屽弬鐓с |
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